Equipment: Rudolph Research FE-III Focus Ellipsometer Manufacturer: Rudolph Description: The FE-III has fully automatic operation and a scanning stage. Unique optical and detection systems measure ellipsometric parameters over an angle range of 40 to 70 degrees simultaneously, giving more flexibility for measuring multiple film stacks. The scanning stage allows wafer uniformity to be evaluated rapidly.
|
AuthorWrite something about yourself. No need to be fancy, just an overview. ArchivesCategories |